Materiale per SEM e TEM

PECVD loadlock system SI 500 PPD

The flexible PECVD system SI 500 PPD features a variety of standard plasma deposition processes. SiO2, SiNx, SiOxNy, and a-Si are deposited with capacitively coupled plasma.
19 Febbraio, 2016/da Demo

PECVD direct loading system Depolab 200

The PECVD system Depolab 200 combines cost effective direct loading and parallel plate plasma source in a basic, compact design. The easy to use direct loading system enables user-friendly batch processing (with carrier or direct loading onto the substrate electrode). The clever PECVD system can be upgraded for enhanced performance on demand
19 Febbraio, 2016/da Demo

QXP-8300 ALD System

Atomic layer deposition is a process for manufacturing ultrathin films for semiconductor components and future non-semiconductor applications
23 Febbraio, 2016/da Demo

QXP-8300 ALD System

Atomic layer deposition is a process for manufacturing ultrathin films for semiconductor components and future non-semiconductor applications
23 Febbraio, 2016/da Demo

QXP-8300 NVM

The Highest Deposition Rate with Excellent Composition Control and Conformality
23 Febbraio, 2016/da Demo

MOCVD – Planetary Reactor

The Planetary Reactor is based on the principle of a horizontal laminar flow reactor. The laminar flow principle ensures extremely precise transitions between different materials, and an unparalleled control over the deposition rates for films that are only a few atoms thick
23 Febbraio, 2016/da Demo

MOCVD – Close Coupled Showerhead

23 Febbraio, 2016/da Demo

Black Magic 2″ – R&D

Applying this methodology, the deposition of thin films takes place by means of chemical reactions, in which the wafers are exposed to a gas mixture that reacts on the wafer surface. The process can also be plasma-enhanced
24 Febbraio, 2016/da Demo

BLACK MAGIC PRO

Wafer-scale Deposition of Carbon Nanotubes and Graphene
BM Pro…
24 Febbraio, 2016/da Demo

BLACK MAGIC 300

24 Febbraio, 2016/da Demo

ICP-RIE plasma etcher SI 500

The high end plasma etching system SI 500 uses an inductively coupled plasma with low ion energy for low damage etching and nano structuring. Repeatable and stable plasma etching conditions are ensured by dynamic temperature control over a wide temperature range. Cryogenic and room temperature, gas chopping processes are applied for deep reactive plasma etching (Si, III-V semiconductors, MEMS)
24 Febbraio, 2016/da Demo

MD-E-3000

Small volume handling with microdrop dispensing system
24 Febbraio, 2016/da Demo