Triple Target, Large Chamber, Turbo-Pumped Sputter Coater

Q300T T

The Q300T T is a large chamber, turbo-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8″/200 mm (e.g. a wafer), or multiple smaller specimens over a similar diameter. The Q300T T is suitable for sputtering both noble and oxidising metals.

Key features

  • Large area, turbo pumped sputter coating – up to 8″/200 mm diameter
  • Triple sputtering head – ensures even coating deposition of large specimens
  • Single target selection – for economic coating of small specimens
  • Fine grain sputtering – for advanced high resolution FE-SEM applications
  • High-vacuum turbo pumping – allows sputtering of a wide range of oxidising and non-oxidising (noble) metals – suitable for SEM, high resolution FE-SEM and also for many thin film applications
  • Precise thickness control using the film thickness monitor option
  • Fully automatic touch screen control – rapid data input, simple operation
  • Easy-to-change, drop-in style specimen stages (rotation stage as standard)
  • Thick film coating – up to 60 minutes sputtering time without breaking vacuum
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