| Model |
QScan |
QScan Plus |
QScan Pro |
|
|
|
|
| Scan Mode |
Dynamic AFM (tapping mode) |
| Scanner |
- 20-500 kHz tip drive frequency
- 4 Hz max scan speed
- One open-loop scanner
| Range (μm) |
Resolution (nm) |
| X |
Y |
Z |
Z |
XY |
| 15 |
15 |
8 |
0.12 |
0.23 |
|
- 20-220 kHz tip drive frequency
- 5 Hz max scan speed
- 4 closed-loop scanner options:
| Range (μm) |
Resolution (nm) |
| X |
Y |
Z |
Z |
XY |
| 100 |
100 |
20 |
0.30 |
1.00 |
| 100 |
100 |
5 |
0.10 |
1.00 |
| 10 |
10 |
10 |
0.01 |
0.01 |
| 10 |
10 |
5 |
0.01 |
0.01 |
|
| Stage |
- Ø 10 mm (1/64”), no travel
- 3 mm (0.12”) max sample height
- 10 g (0.35 oz) max sample weight
|
- Ø 30 mm (3/64”), 6 mm (1/4“) travel
- 10 mm (0.39”) max sample height
- 10 g (0.35 oz) max sample weight
|
- 50 mm x 50 mm (2” x 2“), 6 mm (1/4”) travel
- 10 mm (0.39”) max sample height
- 100 g (3.5 oz) max sample weight
|
| Optical |
Astigmatic detection system with perpetually aligned optical design
Industry-leading 0.56 μm spot size and 30 pm optical resolution |
| Camera |
None |
- Integrated dual-camera
- Side camera 6” x 6” (150 mm x 150 mm) FOV
- Top camera 200 microns x 200 microns FOV
|
| Controller |
- ± 10 V scan drive signal
- 16 bit resolution
- 128 – 1024 scan points
- < 70 pm vertical noise floor
|
| Size |
Main Body
4.7”(W) x 4.7”(L) x 4.7”(H), 4.4 lbs
AFM Controller
8.3”(W) x 8.7”(L) x 5.9”(H), 8.8 lbs |
Main Body
9.4”(W) x 9”(L) x 11.4”(H), 19.8 lbs
AFM Controller
8.3”(W) x 8.7”(L) x 5.9”(H), 8.8 lbs |
Main Body
9.4”(W) x 9”(L) x 11.4”(H), 22 lbs
AFM Controller
16.5”(W) x 16.5”(L) x 3.9”(H), 15.4 lbs
Stage Controller
16.5”(W) x 14.6”(L) x 3.5”(H), 15.4 lbs |
| Software |
PSX PC Software
- One-Click Scan predictive algorithm
- Phase, amplitude, topography, 3D
- Line profile XZ, YZ
- Real-time flattening
- Natural language design & intuitive UI
- Library management and export
|
PSX Pro PC Software
- One-Click Scan predictive algorithm
- Phase, amplitude, topography, 3D
- Line profile XZ, YZ
- Real-time flattening
- Natural language design & intuitive UI
- Scan result export
|
| Analysis |
ASX Analysis Software with length, height, roughness, image filtering, advanced plane fit, pore analysis |
| In The Box |
Main AFM unit
AFM Controller box (100~240 V)
NEMA-15 power cord (14 AWG, 1.8 m)
Probe holder & laser teflon diffuser
Tool kit (tweezers, screwdriver, sample)
Acrylic acoustic box
2 HDMI cords, 1 USB cord
Laptop (Win 7 Pro, TeamViewer) |
Main AFM unit
AFM Controller box (100~240 V)
NEMA-15 power cord (14 AWG, 1.8 m)
Probe holder
Tool kit (tweezers, screwdriver, sample)
Acrylic acoustic box
3 HDMI cords, 2 USB cords
Laptop (Win 7 Pro, TeamViewer) |
Main AFM unit
AFM Controller box (100~240 V)
Stage Controller box (100~240 V)
Probe holder
Tool kit (tweezers, screwdriver, sample)
Acrylic acoustic box
2 power cords (110 V), 3 HDMI cords,
2 USB cords, 3 BNC signal cords,
1 cable bundle, 1 VHDCI-D cord
Desktop computer with FPGA card
(Win 7 Pro, TeamViewer) |
