The Highest Deposition Rate with Excellent Composition Control and Conformality

QXP-8300 NVM


  • Excellent gapfill of GST in >5:1 AR structures in 2x node
  • Excellent thickness and composition control using vaporizers
  • High throughput
  • Flexible choice of precursors using vaporizers

Films for Non-Volatile Memory

  • Chalcogenide films for PCRAM GeSbTe · GeTe · SbTe InSbTe · doped-GeSbTe
  • ReRAM oxides HfOx · ZrOx · TiOx · TaOx

Films for Heater Elements and Electrodes

  • Heater element and electrodes TiN · TaN · TaAIN