Q150T Turbo-Pumped Sputter Coater/Carbon Coater

Q150T

The Q150T is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the Q150T can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), a carbon coater suitable for SEM and transmission electron microscopy (TEM), or both – in a single easy-to-use system. Other options include metal evaporation and aperture cleaning.

Key features

  • Metal sputtering or carbon evaporation, or both – combined in one space-saving design
  • Fine grain sputtering – ideal for high resolution FE-SEM
  • High vacuum turbo pumping – allows sputtering of a wide range of oxidising and non-oxidising metals – suitable for W-SEM, FE-SEM and also for many thin film applications
  • High vacuum carbon coating – ideal for SEM and TEM carbon coating
  • Controlled ramped carbon rod evaporation – precise control and superior carbon films
  • Pulsed or ramped carbon coating modes – ramped evaporation can be selected for enhanced control and reproducibility of deposited carbon
  • Glow discharge, metal evaporation and aperture cleaning options
  • Fully automatic touch screen control – rapid data input, simple operation
  • Easy-to-change, drop-in style specimen stages (rotation stage as standard)
  • Vacuum shut-down feature – leaves the process chamber under vacuum when not in use to give improved vacuum performance
  • Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum (rest periods automatically built in)
  • Three-year warranty