Scanning XPS Microprobe


The core technology of the Quantera II is PHI’s patented, monochromatic, micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance. Spectroscopy, depth profiling, and imaging can all be performed over the full range of x-ray beam sizes including the minimum x-ray beam size of less than 7.5 µm. In addition to superior XPS performance characteristics the Quantera II provides two in situsample parking stations which enables the automated analysis of all three sample platens in a single user defined analysis queue.