Flexible R&D Reactor for Carbon Nanotubes and Graphene

BLACK MAGIC II – 2″ R&D

Features

  • Fast response heater, up to 1,000 °C/minute ramp rates
  • Interchangeable 1 inch square and 2 inch round heaters supplied
  • Thermal CVD
  • Plasma enhanced CVD
  • Excellent reproducibility

Control

  • Automatic process control
  • Easy recipe editing
  • Integrated process camera
  • Remote operation via TCP/IP

Advanced Design

  • High plasma stability
  • Non contaminating showerhead

Benefits

  • Fast growth and processing
  • Low cost of ownership and maintenance
  • Easy cleaning
  • User accounts and access control
  • Real-time data logging
  • Consumables trackinG

Additional Features

  • Extra mass flow controllers
  • Electrical feedthroughs for in-situ biasing
  • Customized gas/liquid inputs
  • Low temperature deposition
  • Mass spectroscopy

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